USE OF LAB6 SEGMENTS IN MAGNETRON SPUTTERING OF A MOSI2–MOB–ZRB2 HETEROPHASE TARGET
https://doi.org/10.56304/S2079562924060101
EDN: MOWOBP
Abstract
The technology of lanthanum doping of oxidation-resistant Mo–Zr–Si–B coatings has been developed by using a 95%(90%MoSi2 + 10%MoB) + 5%ZrB2 target with LaB6 segments for magnetron sputtering. A change in the current–voltage characteristic has been determined when using additional segments. It has been found that the use of LaB6 leads to a decrease in the breakdown voltage of the glow discharge. Mo–Zr–Si–B and Mo–La–Zr–Si–B coatings with a uniform distribution of elements through the thickness, low roughness, and a low-defect structure have been obtained by magnetron sputtering. The use of LaB6 segments during sputtering leads to amorphization of coatings and increased oxidation resistance under annealing in air at 1500°C.
About the Authors
F. I. Chudarin
National University of Science and Technology MISIS
Russian Federation
Russian Federation
A. D. Chertova
National University of Science and Technology MISIS
Russian Federation
Russian Federation
E. A. Levashov
National University of Science and Technology MISIS
Russian Federation
Russian Federation
Ph. V. Kiryukhantsev-Korneev
National University of Science and Technology MISIS
Russian Federation
Russian Federation
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Review
For citations:
Chudarin F.I., Chertova A.D., Levashov E.A., Kiryukhantsev-Korneev P.V. USE OF LAB6 SEGMENTS IN MAGNETRON SPUTTERING OF A MOSI2–MOB–ZRB2 HETEROPHASE TARGET. Nuclear Physics and Engineering. 2025;16(1):38-42. (In Russ.) https://doi.org/10.56304/S2079562924060101. EDN: MOWOBP
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