Comparative Study of the Composition and Structure of the Target (ZrSi2–ZrB2– MoSi2)/Cr and Coatings Formed Using Them by the DCMS and HIPIMS Methods
https://doi.org/10.56304/S207956292301013X
Abstract
This work is devoted to the production of a ceramic target (ZrSi2–ZrB2–MoSi2)/Cr by hot pressing of products of self-propagating high-temperature synthesis and deposition of coatings in the Zr–Si–Mo–B system by DC magnetron sputtering and high-power pulsed magnetron sputtering. The composition and structure of the initial powder mixtures, SHS products, a two-layer functionally graded target, and coatings deposited during its sputtering have been studied. It is shown that the developed target (ZrSi2–ZrB2–Mo–
Si2)/Cr can be successfully used to obtain coatings with a dense homogeneous defect-free structure, including at high-energy sputtering regimes, peak current of 50 A, and peak power of 50 kW.
Keywords
zirconium and molybdenum disilicides,
self-propagating high-temperature synthesis,
hot pressing,
magnetron sputtering,
HIPIMS,
targets and coatings,
composition and structure
Supporting agencies: This work was supported by the Russian Science Foundation, project no. 23-49-00141
About the Authors
Ph. V. Kiryukhantsev-Korneev
National University of Science and Technology “MISIS”, Moscow, 119049 Russia
Russian Federation
Russian Federation
А. D. Sytchenko
National University of Science and Technology “MISIS”, Moscow, 119049 Russia
Russian Federation
Russian Federation
А. Yu. Potanin
National University of Science and Technology “MISIS”, Moscow, 119049 Russia
Russian Federation
Russian Federation
S. I. Rupasov
National University of Science and Technology “MISIS”, Moscow, 119049 Russia
Russian Federation
Russian Federation
N. V. Shvyndina
National University of Science and Technology “MISIS”, Moscow, 119049 Russia
Russian Federation
Russian Federation
Е. А. Levashov
National University of Science and Technology “MISIS”, Moscow, 119049 Russia
Russian Federation
Russian Federation
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Review
For citations:
Kiryukhantsev-Korneev P.V., Sytchenko А.D., Potanin А.Yu., Rupasov S.I., Shvyndina N.V., Levashov Е.А. Comparative Study of the Composition and Structure of the Target (ZrSi2–ZrB2– MoSi2)/Cr and Coatings Formed Using Them by the DCMS and HIPIMS Methods. Nuclear Physics and Engineering. 2024;15(2):109-115. (In Russ.) https://doi.org/10.56304/S207956292301013X
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