Creation of Promising Thin Film Electrode Using Vacuum Deposition Methods
https://doi.org/10.56304/S2079562922030113
Abstract
The automated vacuum technology complex LOTUS 2I-VE is presented, and the current state in the field of creation of film electrode systems is considered. The present features of the technological equipment for the creation of promising multifunctional films are examined.
About the Authors
S. G. DavydovRussian Federation
Moscow, 127055
A. N. Dolgov
Russian Federation
Moscow, 127055
A. A. Kozlov
Russian Federation
Moscow, 127055
V. А. Maksimov
Russian Federation
Moscow, 127055
V. O. Revazov
Russian Federation
Moscow, 127055
R. Kh. Yakubov
Russian Federation
Moscow, 127055
References
1. Давыдов С.Г., Максимов В.А., Ревазов В.О., Якубов Р.Х. // Труды 15-й Междунар. конф. “Пленки и покрытия 2021”. 2021. Санкт-Петербург: ООО “РПК “Амиго Принт”. С. 128−132.
2. Кулаева М.В. Автореферат дисс. к.т.н. 1998. Владикавказ: Северо-Кавказский гос. технол. унив.
3. Davydov S.G., Dolgov A.N., Kozlov A.A., Maksimov V.A., Yakubov R.Kh. // J. Phys.: Conf. Ser. 2021. V. 2059 (1). P. 012006.
Review
For citations:
Davydov S.G., Dolgov A.N., Kozlov A.A., Maksimov V.А., Revazov V.O., Yakubov R.Kh. Creation of Promising Thin Film Electrode Using Vacuum Deposition Methods. Nuclear Physics and Engineering. 2022;13(6):545-549. https://doi.org/10.56304/S2079562922030113
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