Magnetron Plasma Sputter Deposited W-Layers Permeability Influence on the Cycling Stability of Thin Film Electrochromic Modules
https://doi.org/10.56304/S2079562922010213
Abstract
The processes of thin film electrochromic modules degradation during their cycling through the formation of blisters within the PVD sputtered tungsten oxide electrode layers are considered. The formation of blisters is shown to be caused by the retention of radical components transported into the tungsten films from the underneath layers of the module’s layerstack. Permeability of the ceramic tungsten-oxide layers of varying stoichiometry is studied by the means of thermal desorption spectroscopy and the ways for increasing the cycling sustainability of tungsten layers through their reactive magnetron PVD in deficiency of reactive component of working gas mixture are proposed.
About the Authors
V. V. Kravchenko
“Octoglass” JSC, Moscow, 123112 Russia
Russian Federation
Russian Federation
D. P. Knyazhev
“Octoglass” JSC, Moscow, 123112 Russia
Russian Federation
Russian Federation
D. D. Bernt
“Octoglass” JSC, Moscow, 123112 Russia
National Research Nuclear University MEPhI (Moscow Engineering Physics Institute), Moscow, 115409 Russia
Russian Federation
Russian Federation
A. A. Pisarev
National Research Nuclear University MEPhI (Moscow Engineering Physics Institute), Moscow, 115409 Russia
Russian Federation
Russian Federation
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Review
For citations:
Kravchenko V.V., Knyazhev D.P., Bernt D.D., Pisarev A.A. Magnetron Plasma Sputter Deposited W-Layers Permeability Influence on the Cycling Stability of Thin Film Electrochromic Modules. Nuclear Physics and Engineering. 2022;13(1):85-90. (In Russ.) https://doi.org/10.56304/S2079562922010213
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